发明名称 APPARATUS FOR GROWING SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To surely carry out the observation of a single crystal pulled from the interior of a chamber by installing a camera head without being influenced by a magnetic field in a place where the magnetic field is strong near the chamber and further providing a camera head control part influenced by the magnetic field in a place separated from the chamber. SOLUTION: This apparatus for growing a single crystal 24 is capable of passing light emitted from the interior of a chamber 10 through a window 28, receiving the light with a light receiving part of a camera head 30, converting the light received with the camera head 30 into an electric signal, transmitting the resultant electric signal through the interior of a coaxial cable 32, feeding the electric signal to a camera head control part 34 and processing the electric signal into an image. An image pickup means is separated into the camera head 30 without being influenced by a magnetic field and the camera head control part 34 which becomes inoperable by an influence of the magnetic field and the camera head control part 34 is then installed in a place sufficiently distant from a magnetic field generating device26 and located in a weak magnetic field to take an image of the single crystal 24. An in-line type charge coupled device (CCD) image pickup element is preferably installed in the camera head 30.
申请公布号 JP2000281483(A) 申请公布日期 2000.10.10
申请号 JP19990094220 申请日期 1999.03.31
申请人 SUPER SILICON KENKYUSHO:KK 发明人 KURAMOTO MAKOTO
分类号 C30B15/26;(IPC1-7):C30B15/26 主分类号 C30B15/26
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