SINGLE CRYSTAL INGOT PRODUCTION APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To surely control the temperature gradients at G1 and G2 parts in a CZ-type single crystal ingot production apparatus provided with a cooling mechanism to cool via a heat-conductive member by improving the heat- conductive member. SOLUTION: The Czochralski-type single crystal ingot production apparatus to pull up a single crystal ingot 17 from a molten raw material 12 in a furnace is provided with a heat-shielding member 18 surrounding the pulling single crystal ingot 17 and shielding the ingot from the ambient heat and a cooler 19 to cool a specific part of the pulling single crystal ingot 17. The cooler 19 has a heat-conducting member having high heat conductivity and a piping system passing a liquid refrigerant and connected to the upper part of the heat-conducting member. The heat-conducting member is composed of an anisotropic heat-conducting material to anisotropically conduct the heat from its bottom upward and the lower part of the conducting member is placed close to the part to be cooled.