| 摘要 |
PROBLEM TO BE SOLVED: To exchange only a sheath heater and also make a device compact. SOLUTION: In a cryopump 1 arranged the cold cylinder 17 of a refrigerator 3 as well as a sheath heater 53 in a vacuum chamber 5 and installed the first/ second heaters 55, 56 of this sheath heater to the first/second cold heads 33, 35 of the cold cylinder respectively, the first/second heaters of the sheath heater are installed to the first/second cold heads by using installation bolts 58, 59 respectively and attachably/detachably and also a heater flange 57 on one end of the sheath heater is installed to the cylinder base 23 of the cold cylinder from the outside of the vacuum chamber by using installation bolts 60 attachably/detachably.
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