发明名称 TURBO-MOLECULE PUMP
摘要 PROBLEM TO BE SOLVED: To provide a magnetic bearing device to prevent the occurrence of the damage and deterioration of the bearing of a protection bearing used when abnormality is occurs to a magnetic bearing due to detecting function abnormality of a gap sensor and the increase of an unbalance amount of a rotary body. SOLUTION: The position of a rotary body 1 is monitored by a gap sensor 4. When abnormality occurs to a magnetic bearing and the rotary body 1 is not supported in the central position of the magnetic bearing, the rotary body 1 is attracted in a given direction by electromagnets 2a and 2b. Excessive oscillation of the rotary body due to vibration in a normal mode of the decelerated rotary body 1 is suppressed, a brake force by rolling resistance is increased, and the damage and deterioration of the bearing of a protection bearing are prevented from occurring.
申请公布号 JP2000283088(A) 申请公布日期 2000.10.10
申请号 JP19990090316 申请日期 1999.03.30
申请人 SHIMADZU CORP 发明人 YAMAGUCHI HITOSHI
分类号 F04D27/00;F04D19/04;F04D29/04;F04D29/046;F04D29/049;F04D29/056;F16C32/04;(IPC1-7):F04D19/04 主分类号 F04D27/00
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