| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the slide wall of a wafer frame cassette to be smoothly and finely moved by a method wherein a plunger which supports a handle is provided to a control mechanism, and a control bar is provided to the plunger so as to push down a controlled material coming into contact with the top surface of the controlled material when the plunger is in operation. SOLUTION: A control mechanism has a structure where a holding material is supported at the rear of a handle 8 through the intermediary of a pair of support pins 16, a plunger 18 is supported on the front of the handle 8 in a freely reciprocating manner, and a pair of control bars 19 push down the controlled material 11 coming into contact with its top surface when the plunger 18 is in operation. The control bars 19 are screwed on the lower side of the plunger 18 through the intermediary of a bolt, the tips 19a of the control bars 19 are each curved like a semi-ellipsoid, and the tips 19a are smoothly brought into contact with the top surfaces of the blocks 11a of the controlled materials 11.</p> |
