| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an organic EL element with good reproducibility. SOLUTION: In the manufacture of an organic EL element furnished on a base board with a transparent electrode, an organic layer which includes a light emitting layer, and a metal electrode, an ITO transparent electrode formed on the base board is subjected to surface treatment so that the work function, cleanliness, and planarity of the ITO electrode are enhanced. After surface processing, the vase board is carried into a measuring chamber 200 without exposing to the atmosphere, and there the cleanliness (XPS), flatness (AFM), and work function of the ITO electrode surface are measured. The obtained values are checked as to whether they meet the prescribed conditions. If the answer is yes, the board measured is transported to an organic layer forming chamber 300 as the next stage, without being exposed to the atmosphere so that an organic layer is formed on the transparent electrode surface after surface processing, and further a metal electrode is formed in a metal electrode forming chamber 400.
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