| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting device of a small and simple configuration which simultaneously reduces a gauss intensity unevenness caused by a laser beam and interference noise caused by an optical integrator. SOLUTION: Related to a lighting device for lighting a mask bearing a specified pattern, a light source 1 for supplying a beam, a multi-beam generating optical system MB which, comprising a reflective member 4 and a beam splitter member 5, converts the beam from the light source 1 into a plurality of beams, and an optical integrator part 9 for forming a plurality of light source images, are provided. Related to the multi-beam generating optical system, the beam splitter member 5 is arranged to face the reflective member 4 at a specified angle, and the beam from the light source 1 is multiply reflected between the reflective member 4 and the beam splitter member 5 to generate a plurality of beams.
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