APPARATUS AND METHOD FOR INSPECTING DISK-SHAPED RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To inspect a disk-shaped recording medium at a high speed with high accuracy in a non-destructive manner. SOLUTION: A disk 2 is irradiated with the laser beam emitted from a laser oscillator 4 through an optical fiber 8, a rotary diffusion plate 10 and an object lens 13. The reflected laser beam from the disk 2 is imaged by a solid-state imaging element 15 and operational processing is applied to the output image outputted from the solid-state imaging element 15 by an operational processing part 6 to inspect the surface shape of the signal recording surface of the disk 2.