AIR FLOW CONTROL METHOD WITHIN A REFLOW FURNACE

摘要

PROBLEM TO BE SOLVED: To realize reliable and accurate suppression of air flow. SOLUTION: An injection port 51 for injecting gas and a suction port 52 for sucking the gas injected against this injection port 51 are provided at least at a substrate putting port 15 or a substrate extracting port 16 within a reflow furnace 1. Generation of air flow is foreseen, based on a substrate position information in the reflow furnace 1 to control the flow of gas to the suction port 52 from the injection port 51 provided as a stopper for reverse flow of air. Generation of gas flow is foreseen and flow of gas is controlled based on this forecasting.