| 摘要 |
PROBLEM TO BE SOLVED: To enhance inspecting efficiency and the probability of acceptance by moving a probe to a new position based on information on rejection in the initial inspection by the probe and performing re-measurement there. SOLUTION: A wiring board is held on a stage and inspection is started. The equipment receives information on an inspecting step, locks the inspecting step until the inspection completes (Step 21), holds its probe in an initial regular position according to initial measuring conditions inputted in advance (Step 22), and compares the measured value of electrical resistance between terminals with an allowable value inputted in advance to make evaluation on a pass/fail basis. If it judges the initial inspection by the probe failed, the equipment moves the probe to a new position and performs measurement again. Thus, inspection on a wide variety of wiring boards can be flexibly and promptly performed and the probability of acceptance can be enhanced in real time.
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