| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of gas flow disturbance at both side ends of a tip end part of a partition plate, which causes a whirl, etc., by providing the partition plate parallel to a substrate surface in a reactive tube on the upper stream side of the substrate forming a thin-film, with a cut part provided at both side ends of the tip end part of the partition plate. SOLUTION: Related to a reactive tube 1, a gas guide part 2 is provided at one end while a gas discharge part 3 at the other end, a susceptor 5 which holds a substrate 4 is provided at a central part, and on the upper stream side of the substrate 4, in short, on the gas guide part 2 side, two partition plates 6 which vertically partition the tnterior of the reactive tube 1 into three layers are horizontally arranged in parallel. On the outer periphery of the reactive tube 1, a high-frequency coil 7 which heats the substrate 4 through the susceptor 5 is provided. The partition plates 6 gradually widen from the gas guiding part 2 side to the substrate 4 so as to correspond to the inner-surface form of the reactive tube. Related to the tip end part of the substrate 4 side, a cut part 10 is provided on both side ends so that a central part 11 protrudes on the substrate 4 side.
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