| 摘要 |
PROBLEM TO BE SOLVED: To make flexible a sensitive surface and to achieve improved sensitivity and response by lifting a piezoelectric element where a piezoelectric crystal thin film is formed on one surface or both the surfaces of a flexible substrate by a specific thickness for retention with a supporting member on a reverse side. SOLUTION: In a sensor 1 for sensing the contact pressure or the like of an object, a piezoelectric lamination body 2 where both the surfaces of a piezoelectric element are covered with an electrode film and further an area on it is laminated by a protection film is lifted by a specific thickness ranging from 0.1 to 20 mm on the ground base by a support spacer 3 or a specific elastic body being provided on a reverse side. In the piezoelectric element, a piezoelectric crystal thin film made of a compound oxide containing lead or the like in Perovskite structure is preferably formed by hydrothermal synthesis on a flexible substrate surface that is made of a metal thin film or the like containing a titanium constituent, for example, on the uppermost surface. The piezoelectric element preferably has a piezoelectric constant of 0.1-20 pC/N and a bending stiffness of 0.1×102-0.1×103 N.mm to obtain improved sensor performance.
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