| 摘要 |
PROBLEM TO BE SOLVED: To effectively reduce stress developed in the boundary between a stacked body of piezoelectric plates and electrodes and an inactive insulator even if the actuator is driven at high voltage and high frequency, by bonding the stacked body and the inactive insulator through the material having a low elastic modulus of a specified value or below. SOLUTION: To an upper and a lower face of a stacked body of piezoelectric plates 2 and electrode plates 3, an inactive insulator 7 is piezoelectrically bonded through the material 6 having a low elastic modulus of 100 GPa or below, Due to this structure, the stress transmitted to the inactive insulator 7 by the displaced stacked body can be effectively reduced by the material 6 of a low elastic modulus, preventing the concentration of the stress in the boundary between the stacked body and the inactive insulator 7, Even if the actuator is driven at high voltage and high frequency, the actuator can be driven for a long time without developing cracks or breakage in the piezoelectric plates 2 or in the inactive insulator 7.
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