发明名称 FLAW INSPECTING APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To enable the extraction of an accurate synthetic image free from shift by correcting the shift of image output accompanied by the positional shift of each CCD of a three-plate type CCD color camera at every color. SOLUTION: The image of the rectangular pattern 34 of a sheet 32 to be inspected is taken by a three-plate type CVCD color camera 33 and respective output signals of R, G, B-CCD 37R, 27G, 37B are stored in corresponding R, G, B image frame memories 38R, 38G, 38B. These image data are read by R, B, G image reading parts 39R, 39G, 39B to be stored in a synthetic image film memory 40. At this time, a scanning angle setting and processing part 12 extracts the shift quantities of the respective image data to set scanning angles at every frame memories and R, G, B scanning angle designating parts 11R, 11G, 11B designate the scanning angles to the respective image reading parts. The image reading parts scan the respective frame memories at the designated angles to obtain respective output image data. Therefore, for example, even if there is positional shift in the CCDs 37R, 37B, corrected normal image data are stored in a synthetic image film memory 40.
申请公布号 JP2000275185(A) 申请公布日期 2000.10.06
申请号 JP19990084336 申请日期 1999.03.26
申请人 TOSHIBA ENG CO LTD 发明人 FUJITA MINORU;KOMORI MITSUO
分类号 G01N21/88;G01N21/27;G01N21/94;(IPC1-7):G01N21/88 主分类号 G01N21/88
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