发明名称 PHASE SAMPLE AND FORMATION OF PHASE SAMPLE
摘要 PROBLEM TO BE SOLVED: To obtain a phase sample which makes it possible to know the value of a phase difference quantity by joining a 2nd transparent substrate to a hollow formation surface of a 1st hollowed transparent substrate by using an adhesive. SOLUTION: On slide glass 1 made of quartz glass, a hollow 3 of 744 nm in depth is formed and cover glass 2 is adhered onto the slide glass 1 with the hollow 3 by using an adhesive. A pattern of the hollow 3 is in a grating shape which differs in pitch and this pattern is used to investigate the relation between the phase difference quantity and resolution. The adhesive has, for example, a refractive index nd=1.538 on the (d) line of a wavelength of 587.6 nm and is given a phase difference by a refractive index difference from the refractive index nd=1.459 of the quartz glass. The phase difference quantityδis found from the difference in refractive index based upon the depth (t) of the hollow 3. Namely, the phase difference quantityδis represented asδ=t(1.538-1.459).
申请公布号 JP2000275535(A) 申请公布日期 2000.10.06
申请号 JP19990077377 申请日期 1999.03.23
申请人 NIKON CORP 发明人 OTAKI TATSURO;KADOMATSU KIYOSHI
分类号 G01J9/00;G01N1/32;G01N21/01;G01N21/41;G02B21/14;(IPC1-7):G02B21/14 主分类号 G01J9/00
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