| 摘要 |
PROBLEM TO BE SOLVED: To fix the top end of a backup pin, without leaving a gap between a component mounting surface of a substrate and the backup pin top end, vacuum chuck the substrate component mounting surface at the backup pin top end, and stably hold the substrate. SOLUTION: Electromagnetic blocks (1)0913, (2)0914, (3)0915, (4)0916 are fixed. The blocks are composed of a U-shaped core 0904, coils (a)0907, (a)0908, (b)0905, (b)0906, bearings 0909, 0910, and bearing stoppers 0911, 0912. A center pin 0903 and the core 0904 are made of a ferroelectric material having high relative permeability. |
