| 摘要 |
PROBLEM TO BE SOLVED: To shorten a starting time and lower heating temperature to restrain breaking of wire or the like by providing a detecting electrode on a zirconia solid electrolyic body, laminating a green sheet of glass-ceramics on the detecting electrode and a heater, and baking them. SOLUTION: A zirconia solid electrolytic body 10 made of ZrO2 and Y2O3 is previously baked to stabilize the form, and a detecting electrode 15, a detecting electrode lead part 7 and a reference electrode 14, a reference electrode lead part 8 are respectively provided on both faces. On the detecting electrode 15, a first green sheet of glass-ceramics (Al2O3, B2O3, SiO2) is laminated, and a second green sheet is laminated thereon and the detecting electrode lead part 7. On both faces of a heater 17 and a heater lead part 13, third and fourth green sheets are respectively laminated, and the second and the third green sheets are in the contact state, A fifth green sheet is laminated on the zirconia solid electrolytic body 10 on the extreme end side of the detecting electrode 15, and it is brought in contact with the first green sheet. In this way, the sensor is constituted and baked. |
