| 摘要 |
PROBLEM TO BE SOLVED: To achieve good contact even if the needle tip of a contact pin has dispersion in height and to make a needle trace formed on an inspection object constant. SOLUTION: An electrostrictive actuator A is fitted to a unit contact probe 12. The electrostrictive actuator A is arranged near a contact pin 15a. When a voltage is applied to the electrostrictive actuator A after a fixed quantity of overdrive is applied to the contact pin 15a, the end section of the unit contact probe 12 is deflected to an inspection object side, thus the needle pressure can be increased. When a DC pulse wave or an AC voltage is applied to the electrostrictive actuator A, the unit contact probe 12 can be vibrated, a scrubbing property is improved, and dust, dirt and needle tip deposits can be removed.
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