| 摘要 |
PROBLEM TO BE SOLVED: To improve producibility by arranging and storing an operation command for each deflection and an operation command for each sub-field on the same time series data. SOLUTION: A bit pattern of a clock as an operation command for each deflection and a bit pattern of a clock as an operation command for each sub- field are vritten in a clock pattern memory 459 in time series each. For example, a logic 1 is written at an interval equivalent to one deflection period as a bit pattern of a clock 391 supplied to an address counter 392 of a main deflector X. An address counter of a profiler of a driving element which sets driving data for each sub-field, that is, a focus coil address counter 419, a CLA address counter 368, an astigmatic coil address counter 431, a magnification coil address counter 439 and clocks 418, 367, 430, 438, 443 supplied to an MOL coil address counter 444 also write the logic 1 for each sub-field. |
