发明名称 SOFT MAGNETIC THIN FILM AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To obtain highly saturated magnetic flux density, superior soft magnetic characteristic, and high electric resistance by a method, wherein the content of cobalt, iron, nickel is contained in a predetermined magnetic thin film, and further a predetermined amount of carbon is contained therein. SOLUTION: A magnetic thin film of the cobalt content of 40 to 70 wt.%, with iron content of 20 to 40 wt.%, nickel content of 5 to 20 wt.%, and carbon content of 0.02 to 0.1 wt.% is obtained. This magnetic thin film is formed by an electric plating method. In this case, as an electric plating bath, an organic compound having an amino group in the molecules is added to a Co-Fe-Ni alloy electric plating bath, containing water soluble cobalt salt such as cobalt sulfate or the like, water soluble iron (II) salt such as iron sulfate (II) or the like, water soluble nickel salt such as nickel sulfate, or the like, and such mixture is used is described. Additionally, the resultant cobalt, iron, nickel, and carbon thin film is heated at 100 to 300 deg.C.
申请公布号 JP2000277332(A) 申请公布日期 2000.10.06
申请号 JP19990204023 申请日期 1999.07.19
申请人 UNIV WASEDA;JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE 发明人 AISAKA TETSUYA
分类号 H01F10/16;C25D3/56;G11B5/127;G11B5/31;H01F10/14;H01F41/24;H01F41/26;(IPC1-7):H01F10/16 主分类号 H01F10/16
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