| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the reflectivity of a substrate by acquiring a substrate reflectivity (substrate emissivity) based on on-time intensity signal and off-time intensity signal which are switched between turned-on state and turned-off state. SOLUTION: An auxiliary lamp 572c is always turned on, and, with a rotative sector for switching effective reflectivity R1 and R2 provided, an auxiliary sector 572a for switching the light-emission from the upper end of an optical fiber 56b between turned-on state and turned-off state, is rotated. A detection part 571 measures emission intensities I0, I1, and IL. A reflectivity pW of a process substrate W is calculated from the emission intensities I0, I1, and IL, and further, effective reflectivity R1 and R2 are acquired using a conversion table corresponding to this kind of a process substrate W acquired already, from the reflectivityρW. Then the process substrate W is thermally processed. Here, a temperature T of the process substrate W is calculated using measured emission intensities I1 and I2 as well as acquired effective reflectivity R1 and R2, and a control part 60 controls a lamp based on the temperature T for temperature-control the substrate W.
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