| 摘要 |
PURPOSE: A vertical operating type probe and probe card is to operate a probe only in a vertical direction, thereby prevent a deposition of a foreign substance on the probe. CONSTITUTION: A vertical operating type probe and probe card comprises a substrate on which a part of or an entire probe is fixed, a probe needle(44) formed at a lower center portion of the probe, and a space formed at an upper portion of the probe. In the space, a part of the probe or the probe needle is vertically moved when the probe is pressed on or released from an object to be tested. A method for fabricating the probe comprises steps of forming the probe at a desired thickness on an entire surface of a wafer by a photolithography, forming the probe needle at a lower portion of the wafer by the photolithography and an etching process, forming the probe, probe circuit, and probe pad at the lower portion of the wafer, and plating a high conductive and oxidization resistant metal(46) only on the probe, probe circuit, and probe pad.
|
