发明名称 |
ACTIVE PROBE FOR AN ATOMIC FORCE MICROSCOPE AND METHOD OF USE THEREOF |
摘要 |
An AFM (10) that combines an AFM Z position actuator (16) and a self-actuated Z-position cantilever (20) (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z-position measurements. The self-actuated cantilever (20) includes a Z-positioning element (36) integrated therewith and an oscillator that oscillates the cantilever (20) at a resonant frequency and at an oscillation amplitude equal to a setpoint value. The AFM includes a first feedback circuit (12) nested within a second feedback circuit (14), wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever (20) during a scanning operation, and the second feedback circuit (14) is responsive to the cantilever control signal to generate a position control signal. |
申请公布号 |
WO0058759(A2) |
申请公布日期 |
2000.10.05 |
申请号 |
WO2000US05450 |
申请日期 |
2000.03.03 |
申请人 |
NANODEVICES, INC. |
发明人 |
ADDERTON, DENNIS, M.;MINNE, STEPHEN, C. |
分类号 |
G01B21/30;G01Q10/06;G01Q20/02;G01Q60/24;G01Q60/34;G05D3/00;G05D3/12;(IPC1-7):G02B/ |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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