APPARATUS FOR STORING CHEMICAL USED IN SEMICONDUCTOR FABRICATING PROCESS

摘要

PURPOSE: An apparatus for storing a chemical is to facilely indicate a level of the chemical stored in a vessel, thereby facilely confirming the remaining amount of the chemical. CONSTITUTION: An apparatus for storing a chemical used in a semiconductor fabricating process comprises a semitransparent vessel(12) for storing the chemical, an injecting tube(14) mounted at an upper portion of the vessel to inject the chemical in the vessel, a level mark(18) displayed on the vessel to confirm an amount of the chemical remained in the vessel, and a displaying member disposed in the vessel to display the remaining amount of the chemical using a flotage thereof. In the apparatus, the displaying member is a buoy(20) which is made of a fluoric resin and has a color and in which air is injected.