| 摘要 |
PURPOSE: A device is provided to coat a metal thin film to shield electronic wave with an excellent adhesion and to form the coated layer in a low temperature. CONSTITUTION: A plastic basic material(11) is installed inside a barrel and the barrel has more than 1x10¬-5 torr of a vacuum. When an initial vacuum is more than 1x10¬-5 torr, argon gas is injected to the barrel through an ion beam generator(14) and the vacuum is kept in 3x10¬5 torr to 7x10¬4 torr. Argon ion having 150eV to 200eV of ion energy is projected to the plastic basic material. Therefore, impurities such as moisture, dioxide, nitrogen and sucked oxygen are removed from the surface of the plastic basic material. Then, the adhesion is enhanced between the plastic basic material and a coated metal thin film.
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