| 摘要 |
PURPOSE: An apparatus and method for fabricating a semiconductor device with a plurality of gas lines is to facilely distinguish the gas lines, thereby stably performing a process with respect to a desired gas line. CONSTITUTION: An apparatus for fabricating a semiconductor device comprises a plurality of gas lines(46,48,50,52,54,56) provided between a bomb box and an equipment(44). Each of the gas lines has an own color different from others to be facilely distinguished by an operator. The bomb box is formed with a first and second box(40,42), and the equipment is a processing chamber. A method for fabricating a semiconductor device with the plurality of gas lines comprises a step of performing a coating process of each gas line made of a stainless steel material so that the each gas line has the own color. Alternatively, the each gas line is made of a material having an its own color.
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