发明名称 METHOD AND APPARATUS FOR FORMING SOLDER BUMPS
摘要 A method of forming solder bumps on pads formed on a surface of a base material includes the steps of supplying solder to a template having a number of through holes formed to correspond to the pads of the base material respectively so that the through holes are filled with the solder, the template having an upper side and an underside, scraping the sides of the template with doctors to remove an excessive amount of solder, and opposing the template to the base material so that the pads are aligned with the through holes respectively, covering the side of the template opposite to the base material with a pressure housing and increasing pressure in an interior of the pressure housing so that a difference in pressure between an exterior and the interior of the pressure housing extrudes the molten solder from the template to the pad side of the base material.
申请公布号 WO0059028(A1) 申请公布日期 2000.10.05
申请号 WO1999JP06629 申请日期 1999.11.26
申请人 NODA SCREEN CO., LTD. 发明人 OGAWA, HIROTAKA
分类号 H01L21/48;H01L21/60;H01L21/68;H05K3/34 主分类号 H01L21/48
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