发明名称 |
Electronic component with strip conductor, e.g. coil or coupler for high frequency application and high speed digital circuits, is produced by conductive layer deposition on metal base layer regions exposed by structured photolacquer layer |
摘要 |
Strip conductor electronic component production involves conductive layer (4) deposition on metal base layer regions (2) exposed by a structured photolacquer layer (3). An electronic component having one or more strip conductors is produced by depositing a metallic base layer (2) on a substrate layer (1), applying and structuring a photolacquer layer (3), depositing an electrically conductive layer (4) on the exposed base layer regions, removing the photolacquer and etching the base layer. Preferred Features: The base layer consists of Cr/Cu and the conductive layer consists of Cu, Ag, Al or Au. |
申请公布号 |
DE19915245(A1) |
申请公布日期 |
2000.10.05 |
申请号 |
DE1999115245 |
申请日期 |
1999.04.03 |
申请人 |
PHILIPS CORPORATE INTELLECTUAL PROPERTY GMBH |
发明人 |
LOEBL, HANS-PETER;OPPEN, PAUL VAN;KLEE, MAREIKE;FLEUSTER, MARTIN |
分类号 |
H01P1/04;H01L21/48;H01L21/60;H01L21/768;H01L23/66;H01P3/08;H01P11/00;H05K1/02;H05K1/03;H05K3/10;H05K3/28;H05K3/38;H05K3/46 |
主分类号 |
H01P1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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