发明名称 Electronic component with strip conductor, e.g. coil or coupler for high frequency application and high speed digital circuits, is produced by conductive layer deposition on metal base layer regions exposed by structured photolacquer layer
摘要 Strip conductor electronic component production involves conductive layer (4) deposition on metal base layer regions (2) exposed by a structured photolacquer layer (3). An electronic component having one or more strip conductors is produced by depositing a metallic base layer (2) on a substrate layer (1), applying and structuring a photolacquer layer (3), depositing an electrically conductive layer (4) on the exposed base layer regions, removing the photolacquer and etching the base layer. Preferred Features: The base layer consists of Cr/Cu and the conductive layer consists of Cu, Ag, Al or Au.
申请公布号 DE19915245(A1) 申请公布日期 2000.10.05
申请号 DE1999115245 申请日期 1999.04.03
申请人 PHILIPS CORPORATE INTELLECTUAL PROPERTY GMBH 发明人 LOEBL, HANS-PETER;OPPEN, PAUL VAN;KLEE, MAREIKE;FLEUSTER, MARTIN
分类号 H01P1/04;H01L21/48;H01L21/60;H01L21/768;H01L23/66;H01P3/08;H01P11/00;H05K1/02;H05K1/03;H05K3/10;H05K3/28;H05K3/38;H05K3/46 主分类号 H01P1/04
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