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发明名称
VORRICHTUNG UND VERFAHREN ZUR DETEKTION UND DISKRIMINATION VON OBERFLÄCHENFEHLERN
摘要
申请公布号
DE69329346(D1)
申请公布日期
2000.10.05
申请号
DE19936029346
申请日期
1993.11.23
申请人
QC OPTICS, INC.
发明人
ALLEN, CHRISTOPHER;BROUDE, VLADIMIROVICH;CHASE, TOBEY;MILLER, PASCAL;ORMSBY, LIONEL;ROSTAING, BRUNO;QUACKENBOS, PAXTON
分类号
G01B11/30;G01N21/88;G01N21/892;G01N21/93;G01N21/95;(IPC1-7):G01N21/88
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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