EQUIPMENT FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An equipment for fabricating a semiconductor is to prevent a pressure unbalance and a reversing differential pressure in the equipment, thereby optimizing an environment in the equipment. CONSTITUTION: An equipment for fabricating a semiconductor comprises a base(12) on which a plurality of units for fabricating semiconductor are mounted, and an automatic air flowing system disposed at the base to control an internal environment of the base. The automatic air flowing system is comprised of a supplying portion(20) disposed at an upper face of the base to supply air to an inside of the base, an exhausting portion(30) disposed at a lower face of the base to discharge the air to the outside of the base, a detecting portion(40) for detecting an internal pressure of the base and outputting a data signal of the internal pressure, and a controlling portion(50) for receiving and comparing the data signal with a predetermined pressure and controlling the air supplying/discharging amount of the supplying portion and the exhausting portion.