| 摘要 |
<p>A simplified system is provided in which the temperature of an object to be processed, such as a wafer, is measured by a noncontact thermometer while removing the effects of stray light from a heating lamp. A window material (6) of a chamber (2) is made of fused silica containing hydroxyl groups. The fused silica containing hydroxyl groups is capable of strongly absorbing light in a wavelength range near 2700 nm. A photodetector element (18) and an optical filter (19) on a photodetector (16) are properly selected so that the photodetector (16) may detect only the light at wavelength near 2700 nm, resulting in the elimination of the effects of stray light from the lamp. Since the window material (6) itself functions as a filter, no other filters are required between the lamp (22) and the object to be heated.</p> |
