DRY ETCHING DEVICE FOR MANUFACTURING IMAGE DISPLAY PANEL

摘要

PURPOSE: A dry etching device for manufacturing an image display panel is provided to maintain the heating temperature in a predetermined region so as to prevent abrupt temperature variation of a window plate. CONSTITUTION: A dry etching device for manufacturing an image display panel includes an electrode plate(1), a window plate(20), a heating pad(21) and a voltage variation member(30). The electrode plate(1) is allocated inside of a vacuum chamber in which a glass substrate(1) is aligned. The electrode plate(1) receives electrical power from outside. The window plate(20) is aligned with the electrode plate and is divided into plurality of window plates. The gas is ionized by a reaction with the electrode plate after the electrical power from outside is received. The heating pad(21) covers the upper portion of the electrode plate. The voltage variation member(30) is electrically coupled with the heating pad. The member grounds the heating pad or supplies a predetermined power to the heating pad.