| 摘要 |
<p>A communication abnormality detecting/coping device and a vacuum pump remote monitor control device are provided, which are capable of detecting the presence/absence of an abnormality in data communication and reducing an influence of the abnormality on a system device when detecting the abnormality. An operation acknowledge message 51 is transmitted to a system device (30) from a turbo-molecular pump control device (20) in Step 1. A reply message (53) indicative of the reception of the operation acknowledgement message 51 by the system device (30) is transmitted to the turbo-molecular pump control device (20) in Step 3. In Step 5, an elapsed period of from a time at which the operation acknowledgement message (51) is transmitted to a time at which a reply message (53) is received is measured, and if the elapsed period exceeds the preset period, the abnormality in the communication system is warned in Step 6. <IMAGE></p> |
