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发明名称
Verfahren zum Extrahieren eines Ionenstromes von einem Raum hohen Vakuums in einen Raum niederen Vakuums
摘要
申请公布号
DE19600298(C2)
申请公布日期
2000.10.05
申请号
DE19961000298
申请日期
1996.01.05
申请人
AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY, MINISTRY OF INTERNATIONAL TRADE & INDUSTRY
发明人
HORINO, YUJI;FUJII, KANENAGA;CHAYAHARA, AKIYOSHI;KINOMURA, ATSUSHI;MOKUNO, YOSHIAKI
分类号
H01J37/08;H01J5/18;H01J33/04;H01J37/301;(IPC1-7):H01J37/301;H01J37/16
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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