SURFACE ACOUSTIC WAVE DEVICE

摘要

A surface acoustic wave device (1) has a substrate (2) made of quartz, a pair of interdigital transducer-shape electrodes (3) made of an aluminum layer, electrode pad (4), and a pair of lattice-shaped reflectors (5) made of the same material as the electrodes (3). The crystal structure of the aluminum layer forming the electrodes (3) is a twin crystal structure, where crystal grains of the (-1 1 1) plane and the (0 0 2) plane and crystal grains of the (1 -1 -1) plane and the (0 0 -2) plane are in a twin crystal relationship with the (-1 1 -1) plane and the (1 -1 1) plane of aluminum as the twin boundaries. Also, the ä1 1 1ü plane of the aluminum layer is oriented at an 8 DEG inclination relative to the ä0 1 0ü plane of quartz forming the substrate 2. <IMAGE>