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发明名称
Ion implantation method
摘要
申请公布号
GB2316224(B)
申请公布日期
2000.10.04
申请号
GB19960012437
申请日期
1996.06.14
申请人
* APPLIED MATERIALS, INC.;* INTEL CORPORATION
发明人
BABAK * ADIBI;MAJEED ALI * FOAD;MITCHELL C * TAYLOR
分类号
C23C14/48;H01L21/265;(IPC1-7):H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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