发明名称 CORROSION PREVENTIVE FOR METAL AND CLEANING SOLUTION
摘要 PROBLEM TO BE SOLVED: To provide a corrosion preventive for metal small in the fear of giving harmful influence on the helth of man and an ecosystem through water environments compared to the conventional case and to provide a cleaning soln. suitable for the cleaning of a semiconductor device consisting essentially of the corrosion preventive. SOLUTION: This corrosion preventive for metal is the one contg. an aliphatic alcohol compd. which is a compd. contg. at least one mercapto in a molecule, in which the number of carbon composing the compd. is >=2, and carbon to which the mercapto group is bonded and carbon to which a hydroxyl group is bonded are adjacently bonded. The cleaning soln. is the one contg. the above corrosion preventive. As to the method for cleaning a semiconductor device, a semiconductor device is cleaned with the above cleaning soln.
申请公布号 JP2000273663(A) 申请公布日期 2000.10.03
申请号 JP20000003568 申请日期 2000.01.12
申请人 SUMITOMO CHEM CO LTD 发明人 TAKASHIMA MASAYUKI;SARARA KENICHI
分类号 B08B3/08;C11D7/34;C23F11/04;C23F11/06;C23F11/16;C23G1/06;C23G1/18;C23G5/032;H01L21/304;(IPC1-7):C23F11/16 主分类号 B08B3/08
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