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发明名称
摘要
申请公布号
JP3094945(B2)
申请公布日期
2000.10.03
申请号
JP19970123852
申请日期
1997.05.14
申请人
发明人
分类号
H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
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