发明名称 |
Robot having a centering and flat finding means |
摘要 |
The present invention is a wafer handling robot which does not require a second mechanism for performing the task of pre-alignment. The robot uses the moving elements of the wafer handling robot which perform the wafer handling tasks to perform the tasks of centering and notch or flat finding of a wafer.
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申请公布号 |
US6126380(A) |
申请公布日期 |
2000.10.03 |
申请号 |
US19980128790 |
申请日期 |
1998.08.04 |
申请人 |
CREATIVE DESIGN CORPORATION |
发明人 |
HILLMAN, GARY |
分类号 |
H01L21/68;H01L21/687;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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