发明名称 |
Alkylated aminoalkylpiperazine surfactants and their use in photoresist developers |
摘要 |
This invention provides water-based compositions, particularly coating, ink, fountain solution, adhesive, agricultural and photoresist developing/electronics cleaning compositions, manifesting reduced equilibrium and dynamic surface tension by the incorporation of a surface tension reducing amount of certain alkylated aminoalkylpiperazine compounds of the structure where one of R1 and R2 is a C5-C14 alkyl or cycloalkyl group and the other is H, or both or R1 and R2 are C5 to C8 alkyl groups, and n is 2 or 3.
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申请公布号 |
US6127101(A) |
申请公布日期 |
2000.10.03 |
申请号 |
US20000484001 |
申请日期 |
2000.01.18 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
LASSILA, KEVIN RODNEY;CARR, RICHARD V. C;MINNICH, KRISTEN ELAINE |
分类号 |
C11D1/40;C11D3/20;C11D3/26;C11D17/08;G03F7/32;H01L21/027;H01L21/304;(IPC1-7):G03C5/30;D11D1/58 |
主分类号 |
C11D1/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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