发明名称 Alkylated aminoalkylpiperazine surfactants and their use in photoresist developers
摘要 This invention provides water-based compositions, particularly coating, ink, fountain solution, adhesive, agricultural and photoresist developing/electronics cleaning compositions, manifesting reduced equilibrium and dynamic surface tension by the incorporation of a surface tension reducing amount of certain alkylated aminoalkylpiperazine compounds of the structure where one of R1 and R2 is a C5-C14 alkyl or cycloalkyl group and the other is H, or both or R1 and R2 are C5 to C8 alkyl groups, and n is 2 or 3.
申请公布号 US6127101(A) 申请公布日期 2000.10.03
申请号 US20000484001 申请日期 2000.01.18
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 LASSILA, KEVIN RODNEY;CARR, RICHARD V. C;MINNICH, KRISTEN ELAINE
分类号 C11D1/40;C11D3/20;C11D3/26;C11D17/08;G03F7/32;H01L21/027;H01L21/304;(IPC1-7):G03C5/30;D11D1/58 主分类号 C11D1/40
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