| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a soft magnetic film provided with sufficient corrosion resistance though being composed of a structure mainly consisting of Fe fine crystal grains, to provide the soft magnetic film and to provide a magnetic head provided with the soft magnetic film. SOLUTION: In a film forming stage shown by the fig. (a), for promoting the convertion of an Fe alloy e.g. of an Fe-Ta-N film 20 into the amorphous one, e.g. Si as metalloid is added by, by atom, >5 to <25%. Then, an Fe-Si-Ta- N film 21 is formed as shown by the fig. (b). By subjecting this Fe-Si-Ta-N film 21 to heat treatment at 530 deg.C, a soft magnetic film 24 having a structure in which a ferromagnetic Fe-Si-Ta-N amorphous phase 23 having high corrosion resistance surrounds the circumferences of Fe-Si fine crystal grains 22 shown by the fig (c) can be produced.
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