| 摘要 |
<p>PURPOSE:To provide a singles wafer case which holds a wafer not coming into contact with its front and rear side so as to protect it against defects and dust and is suitable for an automatic treating process. CONSTITUTION:Holder pieces 16A and 17A are brought into area contact with the chamfered face Wr of a silicon wafer W to hold it separate from a lower holder plate 16 and an upper holder plate 17. The holder pieces 16A and 17A are provided to the disk-shaped holder plates 16 and 17, protruding from their outer edges respectively, and the holder plates 16 and 17 are elastically supported with an upper case main body through the intermediary of springs 18 and 19. Four holder pieces 16A and 17A are provided to the holder plates 16 and 17 along their circumferential edges respectively conforming to the circumference of the silicon wafer W, and a gap through which a robot hand is put through is provided around the chamfered face Wr of the wafer W. The cases 12 and 13 are linked together with a hinge 14 into one piece, and an engaging pawl 13c is fitted into an engaging hole 12c to make the cases 12 and 13 closable.</p> |
