| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer holder suitable for an automatic transfer of a wafer. SOLUTION: A wafer holder 6 which holds a wafer when a CVD film is formed on the surface of the wafer 2 is equipped with a wafer holder main body 6a provided with a flat surface and pawls 7 provided along the periphery of the wafer 2 on the flat surface of the wafer holder main body 6a. The wafer 2 held by stepped parts 7a provided in the pawls 7 is levitated up from the flat surface of the wafer holder main body 6a so as to provide a gap between the wafer 2 and the flat surface of the wafer holder main body 6a for inserting a wafer transfer arm 4.</p> |
