| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a glassy carbon-coated carbon material having excellent chemical stability such as excellent oxidation resistance and excellent plasma resistance. SOLUTION: This method for producing a glassy carbon-coated carbon material comprises mixing an organic silane compound containing one to three Si atoms in the molecule with a thermosetting resin liquid, coating the obtained raw material resin liquid on the surface of a carbonaceous substrate, thermally curing the coated resin liquid, and then sintering and carbonizing the cured resin in a non-oxidizing atmosphere. The method for producing a glassy carbon- coated carbon material further comprises mixing an organic silane compound containing one to three Si atoms in the molecule and having one or more oxygen atoms bound to each of the Si atoms or to either of the Si atoms with a thermosetting resin liquid, coating the obtained raw material resin liquid on the surface of a carbonaceous substrate, thermally curing the coated resin liquid, and then sintering and carbonizing the cured resin in a non-oxidizing atmosphere.
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