| 摘要 |
A diaphragm pump is provided with a diaphragm defining a pump chamber and a drive chamber in the pump housing, a driving fluid is supplied to the drive chamber and a pump fluid is expelled from the pump chamber. The diaphragm pump is provided with pressure control means which, when the pressure in the pump chamber surpasses the pressure in the drive chamber neighboring the pump chamber across the diaphragm, controls the pressure of the driving fluid based upon output signals from pressure sensors in such a manner that the pressure in the fluid chamber will become higher than the pressure in the neighboring drive chamber. This makes it possible to prevent a diaphragm reversal phenomenon, wherein a diaphragm that should expand toward the pump chamber contracts toward the drive chamber instead during reciprocation of the diaphragm.
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