发明名称 |
Device and method for examining the smoothness of a sample surface |
摘要 |
A device for examining the smoothness of a sample surface includes a scattered-light instrument for scanning the surface with a focused laser beam and for detecting scattered light which is reflected during the scanning of the surface. There is also an instrument for microscopic examination of prominently light-scattering regions of the surface after they have been identified using the scattered-light instrument. This device has an evacuable sample chamber, in which the sample is placed on a sample holder and which has a transparent window through which the laser beam passes before it strikes the surface of the sample. There is also a method for examining a sample using the device.
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申请公布号 |
US6128073(A) |
申请公布日期 |
2000.10.03 |
申请号 |
US19980025674 |
申请日期 |
1998.02.18 |
申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG |
发明人 |
HENZLER, MARTIN;KUMPE, RALF;FRISCHAT, HANNES;KOPP, FRANZ-OTTO |
分类号 |
G01N21/88;G01N21/94;G01N21/956;G01Q60/10;G01Q60/18;G01Q60/24;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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