发明名称 Unit for measuring optical properties
摘要 A unit for measuring optical properties. The unit includes the first through sixth reflecting surfaces, a reflecting surface rotating device and an object moving device. In order to accurately measure transmittance, reflectance and phase change in transmittance or reflection of optical elements, especially transmittance of a thick object, the first through the fourth reflecting surfaces M1-M4 are arranged so that an optical path formed by the reflecting surfaces M1-M4 has a shape like an "N" letter and so that light of incidence L1 has the same optical axis as exit light L2. An optical center O is a point that a line segment that connects a point of incidence A with an exit point D intersects an optical path that connects the reflecting surface M2 with the reflecting surface M3. The reflecting surface M2 is an ellipsoid of revolution having foci of the optical center O and the point of incidence A. The reflecting surface M3 is an ellipsoid of revolution having foci of the optical center and the exit point D. A reflecting surface rotating device rotates M4 at the exit point D in conjunction with the reflecting surface M1 that is rotated at the point of incidence A. The reflecting surface M5 is a parabolic mirror that makes light reflected from the reflecting surface M1 parallel. M6 is a parabolic mirror that converges light reflected from the reflecting surface M5 onto the reflecting mirror M4.
申请公布号 US6128093(A) 申请公布日期 2000.10.03
申请号 US19990414075 申请日期 1999.10.07
申请人 NIKON CORPORATION 发明人 NIIKURA, HIROSHI
分类号 G01N21/01;G01N21/21;G01N21/27;G01N21/41;G01N21/55;G01N21/59;(IPC1-7):G01N21/00 主分类号 G01N21/01
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