| 摘要 |
<p>PURPOSE:To provide an automatic manufacturing method and device for the supersmall-sized parts which is equipped with the flexibility for the multikind and small quantity production and can sufficiently dispose of the environmental equipment such as a clean room and a vacuum chamber. CONSTITUTION:A thin-shaped clean robot 10 for the versatile-used clean formation and an automatic mounting/demounting type supersmall-sized tool 20 are installed in an automatic working device 1, which is equipped with a highly rigid body 30 which is high-rigidly formed for facilitating transportation, high rigid ceiling 40, optical communication system for wireless form, and a supersmall-sized unit 80. A manufacturing system which is constituted by arranging a plurality of automatic working devices 1 in demountable manner in parallel along a transport passage is further equipped with an accommodating base for this device which facilitates the construction of an on-table integration system, supersmall-sized assembly system element group, and a controller for integration control.</p> |
