LIQUID SOURCE SUPPLYING SYSTEM AND ITS WASHING METHOD AND VAPORIZER

摘要

PROBLEM TO BE SOLVED: To enable an operator to know an adequate time for maintenance and a state of a supply source. SOLUTION: This liquid supply system has a pump 2 for delivering the liquid to be supplied with a high pressure and a vaporizer 6 for vaporizing the liquid delivered by this pump 2, vaporizes the liquid by the vaporizer 6 and introduces the vapor into a reaction chamber. A route arriving at the vaporizer 6 from the pump 2 is provided with a pressure gage 7 and is provided with a monitor device 8 for displaying the pressure in accordance with the output of this pressure gage 7.