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发明名称
摘要
申请公布号	JP3095564(B2)	申请公布日期	2000.10.03
申请号	JP19920352324	申请日期	1992.12.11
申请人		发明人
分类号	H01L21/033;H01L21/225;H01L21/28;H01L21/336;H01L21/8238;H01L27/092;H01L29/08;H01L29/423;H01L29/78;(IPC1-7):H01L29/78	主分类号	H01L21/033
代理机构		代理人
主权项
地址

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